GLA announces the availability of the Intelligent Multimode Wafer Transfer System for 150 & 200mm wafers. The system employs the latest in DSP controls, stepping motors and sensory feedback to meet the stringent demands for reliability, speed, ease of use and error free operation in today's highly automated wafer fabs. The Intelligent Multimode Wafer Transfer System includes the GLA Automatic Notch/Flat Wafer Aligner and OCR Wafer ID Reader at a fraction of the cost of these capabilities purchased as standalone systems. Smooth microcomputer controlled wafer transfer from shipping carrier to process cassettes takes less than 25 seconds. Models are also available to meet almost all transfer requirements including wafer transfer to quartz boats. Requiring only 120/240VAC input, the system can be installed and fully operational with little effort and minimal interruption of operations.

　　Features:

　　Inverted pendulum transfer arm

　　Reliable, fast wafer transfer

　　Maps cassette and reads wafer IDs

　　Aligns wafers

　　Gallium arsenide and silicon wafers

　　Small footprint (530mm X 530mm)

　　DSP controls with sensory feedback

　　Fail-safe operation

　　Class 1 rated

　　Options:

　　Barcode reader

　　RF tag reader

　　GEM/SECS-II interface

　　25-25 to 50 Teflon boat

　　Wafer transfer only